JPH0281038U - - Google Patents

Info

Publication number
JPH0281038U
JPH0281038U JP15950388U JP15950388U JPH0281038U JP H0281038 U JPH0281038 U JP H0281038U JP 15950388 U JP15950388 U JP 15950388U JP 15950388 U JP15950388 U JP 15950388U JP H0281038 U JPH0281038 U JP H0281038U
Authority
JP
Japan
Prior art keywords
processing apparatus
heating element
transparent
cover body
base material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15950388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15950388U priority Critical patent/JPH0281038U/ja
Publication of JPH0281038U publication Critical patent/JPH0281038U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP15950388U 1988-12-09 1988-12-09 Pending JPH0281038U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15950388U JPH0281038U (en]) 1988-12-09 1988-12-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15950388U JPH0281038U (en]) 1988-12-09 1988-12-09

Publications (1)

Publication Number Publication Date
JPH0281038U true JPH0281038U (en]) 1990-06-22

Family

ID=31440774

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15950388U Pending JPH0281038U (en]) 1988-12-09 1988-12-09

Country Status (1)

Country Link
JP (1) JPH0281038U (en])

Similar Documents

Publication Publication Date Title
JPH0281038U (en])
JPH01140821U (en])
JPS62148570U (en])
JPS62107439U (en])
JPH02122597U (en])
JPS5515909A (en) Ozonizer
JPS57178146A (en) Detector for gaseous component
JPH01113332U (en])
JPS6231777B2 (en])
JPS612064A (ja) ガス中の水素または水蒸気濃度検出器
JPH04750U (en])
JPS62104436U (en])
JPS6350128U (en])
JPH0165131U (en])
JPS6361748U (en])
JPS6236065U (en])
JPS61141927U (en])
WO1991010120A3 (en) Semiconductor cavity device with electric lead
GB2255229A (en) Semiconductor cavity device with electric lead
JPS6255564U (en])
JPH0324249U (en])
JPS60181027U (ja) 反応性イオンエツチング装置
JPH0251216U (en])
JPH01113341U (en])
JPH0268469U (en])